Aggiefab Internal Header

Equipment

AggieFab Schematic 121223

Lithography/Patterning

Location

Heidelberg MLA150 Maskless Lithography System

D2

Nanoscribe Photonics GT2 high-resolution 3D Printer Direct Laser Write Lithography

D3

EVG 610 Double-sided Mask Aligner

D4

Suss MA-6 Mask Aligner

D5

BIDTEC SP100 Spin Coater

D6

TESCAN MIRA3 E-beam Writer

D8

Characterization

Location

Woollam Alpha-SE Spectroscopic Ellipsometer

A1

Bruker DektakXT Profiler

A2

Ocean Optics Film Measurement

A4

Micromanipulator 6100 Probe Station

A7

Veeco 4 Point Probe

A8

Leica Reichert Polylite 88 Optical Microscope

C5 and C7

Caltex 3D Microscope

C6

Nikon Eclipse LV150N Optical Microscope

D1

FEI Helios NanoLab 460F1 DualBeam Focused Ion Beam (FIB)

D7

Bonding/Dicing

Location

K&S Wire Bonder

A3

Micro Automation Dicing Saw

A9

Disco Hi-Tec Dicing Saw

A5

EVG 501 Wafer Bonder

A6

Deposition/Diffusion

Location

Cressington Gold Sputter Coater

B1

B6

ASM P8200/P3000 ALD

B7

Lesker PVD 75 E-Beam Evaporator 1

B8

Lesker PVD 75 E-Beam Evaporator 2

B9

Oxford Plasmalab 80 PECVD

B10

Lesker PVD 75 DC Sputter

B11

Lesker PVD 75 RF Sputter

B12

Minibrutes Oxidation/Anneal Furnace

B13

MTI RTP Anneal Furnace

B2, B3, and B4

PDS 2010 Labcoter2 Parylene Deposition System

C2

CLUSTEX 100sp Sputter

C9

Plasma Etching

Location

Tegal Plasmaline 421 asher

B5

Oxford Estrelas DRIE

C1

Nordson March CS-1701 RIE

C3

Oxford Plasmalab 100 ICP RIE

C4

Rapid Prototyping

Location

PLS6.120D Laser Engraver

RP

Roland MDX-50 Benchtop CNC

RP

EnvisionTech 3D Printers

RP

Other Equipment

Location

Laurell Spin Coater

Bay 4

Baxter Drying Ovens

Bay 4

Hot Plate Vacuum Chamber

Bay 4

Bays 1 & 4