Aggiefab Internal Header

Equipment

Aggiefab Diagram V3 Sized

Lithography/Patterning

Location

Nanoscribe Photonics GT2 high-resolution 3D Printer Direct Laser Write Lithography

D2

Suss MA-6 Mask Aligner

D3

EVG 610 Double-sided Mask Aligner

D4

BIDTEC SP100 Spin Coater

D5

FEI Helios NanoLab 460F1 DualBeam Focused Ion Beam (FIB)

D6

TESCAN MIRA3 E-beam Writer

D7

Zeiss Orion Plus 5015 Helium Ion Microscope/NanoFab

D8

Characterization

Location

Veeco NT 9100 Profiler

A1

Bruker DektakXT Profiler

A2

Ocean Optics Film Measurement

A4

Micromanipulator 6100 Probe Station

A7

Veeco 4 Point Probe

A8

Leica Reichert Polylite 88 Optical Microscope

A10/C5

Caltex 3D Microscope

C1

Nikon Eclipse LV150N Optical Microscope

D1

Bonding/Dicing

Location

K&S Wire Bonder

A3

Micro Automation Dicing Saw

A5/A9

EVG 501 Wafer Bonder

A6

Deposition/Diffusion

Location

Cressington Gold Sputter Coater

B1

B5

ASM P8200/P3000 ALD

B6

Lesker PVD 75 E-Beam Evaporator 1

B7

Lesker PVD 75 E-Beam Evaporator 2

B8

Oxford Plasmalab 80 PECVD

B9

Lesker PVD 75 DC Sputter

B10

Lesker PVD 75 RF Sputter

B11

Minibrutes Oxidation/Anneal Furnace

B12

MTI RTP Anneal Furnace

B2/B3

PDS 2010 Labcoter2 Parylene Deposition System

C2

CLUSTEX 100sp Sputter

C7

Plasma Etching

Location

Nordson March CS-1701 RIE

C3

Tegal Plasmaline 421 asher

B4

Oxford Plasmalab 100 ICP RIE

C4

Rapid Prototyping

Location

PLS6.120D Laser Engraver

RP

Roland MDX-50 Benchtop CNC

RP

EnvisionTech 3D Printers

RP

Other Equipment

Location

Laurell Spin Coater

Bay 4

Baxter Drying Ovens

Bay 4

Hot Plate Vacuum Chamber

Bay 4

Bays 1 & 4

AF Contacts By Bay