
Lithography/Patterning
Location
Characterization
Location
Bonding/Dicing
Location
Deposition/Diffusion
Location
B5
B2/B3
Plasma Etching
Location
Rapid Prototyping
Location
Other Equipment
Location
Bay 4
Bay 4
Bay 4
Bays 1 & 4
Lithography/Patterning
Location
Characterization
Location
Bonding/Dicing
Location
Deposition/Diffusion
Location
B5
B2/B3
Plasma Etching
Location
Rapid Prototyping
Location
Other Equipment
Location
Bay 4
Bay 4
Bay 4
Bays 1 & 4