The G&N RC Plus Backside Grinder is a high precision surface grinding machine for difficult to process materials. This system is equipped with a control panel for programming and running automatic processes, an in-process thickness gauge, a fully enclosed grinding area, and a low vibration mainframe.
- Process Materials: Si, GaAs, glass, SiO2
- Substrate Size: S
- Fast down feed speed: 3 – 375,000 um/min
- Rough grinding speed: 3 – 1,000 um/min
- Fine grinding speed: 3 – 1,000 um/min
- Spark-out time: 0 – 999 sec
- Smallest programmable down feed step: 1 um
- Rotary table speed: 4 – 240 rpm
- Grinding spindle: 500 – 4,200 rpm
Coming Soon: Backside Grinder Standard Operating Procedure
