Welcome to the AggieFab Nanofabrication Facility
The AggieFab Nanofabrication Facility at Texas A&M University is a shared nanofabrication facility located in the Frederick E. Giesecke Engineering Research Building at Texas A&M University. The facility has over 6,500 sq. ft. of class 100/1000 cleanroom space with a raised access floor and vertical laminar flow, and an additional 4,500 sq. ft. of support space, totaling 11,000 sq. ft. The facility’s move to its current location was enabled by a $12M investment from the Texas A&M Engineering Experiment Station (TEES), along with additional support by the Department of Electrical and Computer Engineering. The facility has state-of-the-art equipment for a wide range of micro- and nano-scale fabrication of diverse materials. During the past 10 years the facility underwent major equipment acquisition. In 2017, the facility acquired $5M worth of new nanopatterning and deposition equipment through a donation by the Hewlett Packard Enterprise (HPE). These include the FEI Helios DualBeam Focused Ion Beam (FIB) and the Clustex Multi-target deposition tool. In the same year, the facility received $1.5M from the Texas A&M University Research Development Fund to purchase several new tools to improve micropatterning and advanced substrate development capabilities. In 2021, the facility received another $1.7M from the Texas A&M University Research Development Fund to purchase new state-of-the-art etching and maskless lithography tools.
Most recently, through a $35M investment by the State of Texas in 2024, the facility acquired numerous new state-of-the-art equipment (e.g., Elionix electron-beam lithography system, multiple atomic layer deposition tools) and underwent major facility upgrades to accommodate the new equipment. The operation of the facility continues to be mainly supported through the State of Texas funding, TEES, Department of Electrical and Computer Engineering, and Office of the Vice President for Research. Additional operation support is provided by the Departments of Mechanical Engineering, Material Science and Engineering, and Chemical Engineering.
For proposal preparation purposes, we prepared a description of the facility as well as a list of available equipment.
Click here to download the file.
AggieFab is located in the Giesecke Engineering Research Building
AggieFab completed its move into the Frederick E. Giesecke Engineering Research Building (GERB) in August 2017 and now resides on the first floor. GEB is located at 1617 Research Parkway in Texas A&M University’s Research Park, and parking is available in the adjacent lot with a campus bus stop near the front of the building.
AggieFab shares the first floor of the Giesecke building with the Materials Characterization Facility (MCF).
