AggieFab Fee Structure
Fees for using AggieFab are currently per month, per user, and are listed below.
Membership fee for Monthly Access
This fee provides the funds for the many items that are needed to operate AggieFab, such as the provided solvents, chemicals, resists, and PVD target materials; protective apparel; cleanroom garments; liquid nitrogen; compressed air; DI water; and consumables (e.g., gloves, shoe covers, hair nets, and face masks).
Per Student (TAMU):
$550 per month maximum ($55 per usage with cap after 10 uses)
Outside Academic Users/Industry:
$825/$1,650 per month maximum ($82.50/$165 per usage with cap after 10 uses)
Training Fees
Area specific and gowning training (45 min – 1 hr):
No cost
Corrosives training (basic for 1 hr or basic + piranha prep for 2 hr)
$50/hr TAMU / $75/hr outside academic / $150/hr industry
Equipment Hourly Use Fee for TAMU Users
ASM ALD (precursor cost may be added)
$45 per hour
Bruker/Veeco Stylus-based Profilometer
$5 per hour*
Clustex 100sp Sputter
$40 per hour
Dekema Austromat 674S Oven
$1.50 per hour for 60 hours
Disco or Microautomation Dicing Saws
$12 per hour
Envision One cDLM Mechanical
$25 per hour
EnvisiontTech Perfactory Mini
$25 per hour
EVG 610 Mask Aligner
$11 per hour
EVG 501 Wafer Bonder
$40 per hour
FEI Helios DualBeam Focused Ion Beam
$64 per hour
Gravotech laser system
$16 per hour
Heidelberg MLA150 Maskless Litho
$65 per hour
K&S Wire Bonder
$10 per hour
Karl Suss Mask Aligner
$6 per hour
Lesker PVD75 Deposition Tools
$17 per hour
Micromanipulator probe station
$10 per hour
MTI/Minibrute Furnaces
$8 per hour
Nanoscribe Photonics 3D Printer
$20 per hour
Nordson March CS-1701 RIE
$10 per hour
Ocean Optics Reflectometer
$5 per hour*
Oxford Estrelas DRIE
$45 per hour
Oxford ICP-RIE
$37 per hour
Oxford PECVD
$37 per hour
Overnight Pump down (5 pm – 8 am) on Lesker Instruments
$3 per hour
PDS 2010 Labcoater 2 Parylene Deposition System
$16 per hour
PLS 6.120D Universal Laser System
$13 per hour
Roland MDX-50 Benchtop CNC Milling Machine
$11 per hour
Tegal Plasmaline 421 Asher
$10 per hour
Tescan EBL
$45 per hour
Tystar LPCVD
$45 per hour
Veeco four-point probe
$5 per hour
Wet Bench
$12 per hour
Minimum 1-hour charge per use. Use over one hour will be rounded to the nearest 15-minute increment
Fees for hourly use of equipment is in addition to monthly access fees
Additional charges for supplies such as crucibles and wafers at will be added to the PI’s monthly statement
*There is no additional hourly rate for use of the wet benches, Ocean Optics reflectometer, Nikon optical microscope, Bruker stylus-based profilometer, and Veeco optical profilometer. All other tools will have an additional hourly rate.
Fees for Staff Operation/Training of Equipment
TAMU Users
- Instrument usage: rates listed above
- Training: instrument rate + $45/hr for staff time
- Hourly fee for staff runs: instrument rate + $65/hr
- Hourly fee for staff assistance/supervision of complex operations: instrument rate + $30/hr
Outside Academic Users
- Instrument rates: 150% of rates listed above
- Training: instrument rate + $67.50/hr for staff time
- Hourly fee for staff runs: instrument rate + $97.50/hr
- Hourly fee for staff assistance/supervision of complex operations: instrument rate + $45/hr
*Non-TAMU users pay instrument rate + staff time for analysis
Industry Users
- Instrument rates: 300% of rates listed above
- Training: instrument rate + $135/hr (staff time)
- Hourly fee for staff runs: instrument rate + $195/hr
- Hourly fee for staff assistance/supervision of complex operations: instrument rate + $90/hr
*Non-TAMU users pay instrument rate + staff time for analysis
