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AggieFab Nanofabrication Facility

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Fees

AggieFab Fee Structure

Fees for using AggieFab are currently per month, per user and are listed below.  Please be aware that this is an introductory fee structure during the transitional period to an open user facility. We will reevaluate every 6 months with an eye toward eventually introducing a per hour fee structure.

Last Updated: 1/6/2021

Fees for Monthly Access

Per Student (TAMU):

$350 per month ($50 per usage- cap @ $350)

Outside Academic Users/Industry:

$525/1,050 per month ($75/$150 per usage- cap @ 1 month cost)

Fees for Hourly Use of Equipment for TAMU Users

Bruker/Veeco Profilometer

$5 per hour*

Ocean Optics Thin Film Measurements

$5 per hour*

MTI/Minibrute Furnaces

$8 per hour

Lesker Instruments

$17 per hour

Overnight Pump down (5 pm – 8 am) on Lesker Instruments

$3 per hour

Dicing Saw

$12 per hour

Wet Bench

$12 per hour

Oxford RIE

$30 per hour

Tegal Plasmaline 421 Asher

$10 per hour

Nordson March CS-1701 RIE

$10 per hour

Oxford PECVD

$30 per hour

Tescan EBL

$39 per hour

EVG 501 Wafer Bonder

$40 per hour

EVG 610 Mask Aligner

$6 per hour

Karl Suss MA-6 Mask Aligner

$6 per hour

FEI Helios DualBeam Focused Ion Beam

$55 per hour

Zeiss Orion HIM

$60 per hour

EnvisiontTech Perfactory Mini

$25 per hour

Envision One cDLM Mechanical

$25 per hour

Roland MDX-50 Benchtop CNC Milling Machine

$11 per hour

PLS 6.120D Universal Laser System

$10 per hour

K&S Wire Bonder

$10 per hour

Tystar LPCVD

$40 per hour

Clustex 100sp Sputter

$40 per hour

ALD (precursor cost may be added)

$45 per hour

Nanoscribe Photonics

$20 per hour

Veeco four-point probe

$5 per hour

PDS 2010 Labcoater 2 Parylene Deposition System

$16 per hour

Minimum 1-hour charge per use. Use over one hour will be rounded to the nearest 15-minute increment

Fees for hourly use of equipment is in addition to monthly access fees

Additional charges for supplies such as crucibles and wafers at will be added to the PI’s monthly statement

*User fees/Membership access fees will be charged for individual users at $50 per reservation until the ceiling of $350/month is reached. There is no additional hourly rate for use of wet bench, Ocean Optics thin film measurement tool, Nikon optical microscope, Bruker profilometer, and Veeco profilometer. All other tools will have an additional hourly rate.

Fees for Staff Operation/Training of Equipment

TAMU Users

  • Instrument usage: rates listed above
  • Training: instrument rate + $40/hr (staff time)
  • Staff time for assisted work: $60/hr

Outside Academic Users

  • Instrument rates: 150% of rates listed above
  • Training: instrument rate + $60/hr (staff time)
  • Staff time: $90/hr
    *Non-TAMU users pay instrument rate + staff time for analysis.

Industry Users

  • Instrument rates: 300% of rates listed above
  • Training: instrument rate + $120/hr (staff time)
  • Staff time: $180/hr
    *Non-TAMU users pay instrument rate + staff time for analysis

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AggieFab Nanofabrication Facility (AggieFab)

Frederick E. Giesecke Engineering Research Building
1617 Research Parkway
College Station, TX 77843

Texas A&M Engineering Experiment Station
Texas A&M University Department of Electrical and Computer Engineering
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