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AggieFab Nanofabrication Facility

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Fees

AggieFab Fee Structure

Fees for using AggieFab are currently per month, per user, and are listed below.  

Membership fee for Monthly Access 

This fee provides the funds for the many items that are needed to operate AggieFab, such as the provided solvents, chemicals, resists, and PVD target materials; protective apparel; cleanroom garments; liquid nitrogen; compressed air; DI water; and consumables (e.g., gloves, shoe covers, hair nets, and face masks).

Per Student (TAMU):

$550 per month maximum ($55 per iLab reservation with cap after 10 reservations)

Outside Academic Users/Industry:

$825/$1,650 per month maximum ($82.50/$165 per iLab reservation with cap after 10 reservations)

Training Fees 

Area specific and gowning training (45 min – 1 hr):

No cost

Corrosives training (basic for 1 hr or basic + piranha prep for 2 hr)

$50/hr TAMU / $75/hr outside academic / $150/hr industry

Equipment Hourly Use Fee for TAMU Users

Allwin21 AccuThermo AW610M RTP

$10 per hour

Bruker Dektak Stylus-based Profilometer

$5 per hour*

Clustex 100sp Sputter

$40 per hour

Dekema Austromat 674S Oven

$1.50 per hour for 60 hours

Disco Dicing Saws

$12 per hour

Envision One cDLM Mechanical

$25 per hour

EnvisiontTech Perfactory Mini

$25 per hour

EVG 610 Mask Aligner

$11 per hour

EVG 501 Wafer Bonder

$40 per hour

Evident Confocal Scanning Microscope

$10 per hour

FEI Helios DualBeam Focused Ion Beam

$64 per hour

Gravotech laser system

$16 per hour

Heidelberg MLA150 Maskless Litho

$65 per hour

iBond5000 Dual Wire Bonder

$10 per hour

Lesker PVD75 Deposition Tools

$17 per hour

Semiprobe probe station

$10 per hour

MTI/Minibrute Furnaces

$8 per hour

Nanoscribe Photonics 3D Printer

$20 per hour

Nordson March CS-1701 RIE

$10 per hour

Ocean Optics Reflectometer

$5 per hour*

Oxford Estrelas DRIE

$45 per hour

Oxford ICP-RIE

$37 per hour

Oxford PECVD

$37 per hour

Overnight Pump down (5 pm – 8 am) on Lesker Instruments

$3 per hour

PDS 2010 Labcoater 2 Parylene Deposition System

$16 per hour

PLS 6.120D Universal Laser System

$13 per hour

Roland MDX-50 Benchtop CNC Milling Machine

$11 per hour

Tegal Plasmaline 421 Asher

$10 per hour

Tescan EBL

$45 per hour

Tystar LPCVD

$45 per hour

UpNano 3D Printer

$75 per hour

4Dimensions four-point probe

$5 per hour

Wet Bench

$12 per hour

Minimum 1-hour charge per use. Use over one hour will be rounded to the nearest 15-minute increment

Fees for hourly use of equipment is in addition to monthly access fees

Additional charges for supplies such as crucibles and wafers at will be added to the PI’s monthly statement

*There is no additional hourly rate for use of the wet benches, Ocean Optics reflectometer, Nikon optical microscope, Bruker stylus-based profilometer, and Veeco optical profilometer. All other tools will have an additional hourly rate.

Fees for Staff Operation/Training of Equipment

TAMU Users

  • Instrument usage: rates listed above
  • Training: instrument rate + $45/hr for staff time
  • Hourly fee for staff runs: instrument rate + $65/hr
  • Hourly fee for staff assistance/supervision of complex operations: instrument rate + $30/hr 

Outside Academic Users

  • Instrument rates: 150% of rates listed above
  • Training: instrument rate + $67.50/hr for staff time
  • Hourly fee for staff runs: instrument rate + $97.50/hr
  • Hourly fee for staff assistance/supervision of complex operations: instrument rate + $45/hr 
    *Non-TAMU users pay instrument rate + staff time for analysis

Industry Users

  • Instrument rates: 300% of rates listed above
  • Training: instrument rate + $135/hr (staff time)
  • Hourly fee for staff runs: instrument rate + $195/hr
  • Hourly fee for staff assistance/supervision of complex operations: instrument rate + $90/hr 
    *Non-TAMU users pay instrument rate + staff time for analysis

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AggieFab Nanofabrication Facility (AggieFab)

Frederick E. Giesecke Engineering Research Building
1617 Research Parkway
College Station, TX 77843

Texas A&M Engineering Experiment Station
Texas A&M University Department of Electrical and Computer Engineering
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