AggieFab Fee Structure
Training Fees
Area specific and gowning training (45 min – 1 hr):
No cost
Corrosives training (basic for 1 hr or basic + piranha prep for 2 hr)
$50/hr TAMU / $75/hr outside academic / $150/hr industry
Equipment Hourly Use Fee for TAMU Users – Effective 10/1/2025
Allwin21 AccuThermo AW610M RTP
$25 per hour
Bruker Atomic Force Microscope
$40 per hour
Bruker Dektak Stylus-based Profilometer
$12 per hour
Cee Spin Coater System
$25 per hour
Clustex 100sp Sputter
$40 per hour
CN1 Thermal and Plasma-enhanced ALD
$50 per hour
Dekema Austromat 674S Oven
$2 per hour for 60 hours
Diener Plasma Cleaner
$25 per hour
Disco Dicing Saws
$30 per hour
Elionix Ebeam Lithography
$80 per hour
Envision One cDLM Mechanical
$25 per hour
EnvisiontTech Perfactory Mini
$25 per hour
Evatec Sputter Tool
$50 per hour
EVG 610 Mask Aligner
$30 per hour
EVG 501 Wafer Bonder
$45 per hour
Evident Confocal Scanning Microscope
$15 per hour
FEI Helios DualBeam Focused Ion Beam
$64 per hour
G&N Backside Grinder
$55 per hour
G&P CMP
$55 per hour
Gravotech laser system
$16 per hour
Heidelberg MLA150 Maskless Litho
$65 per hour
iBond5000 Dual Wire Bonder
$45 per hour
Laurell Photo and EBL Spin Coaters
$20 per hour
Lesker Ebeam Evaporation and Sputter Tools
$35 per hour
Samco PECVD
$45 per hour
Semiprobe probe station
$16 per hour
MTI/Minibrute Furnaces
$15 per hour
Nanoscribe Photonics 3D Printer
$20 per hour
Nordson March CS-1701 RIE
$15 per hour
Ocean Optics Reflectometer
$10 per hour
Oxford Estrelas DRIE
$55 per hour
Oxford PECVD
$45 per hour
Overnight Pump down (5 pm – 8 am) on Lesker Instruments
$3 per hour
Plasma-Therm Corial F-Based ICP-RIE
$45 per hour
Plasma-Therm Corial Cl-Based ICP-RIE
$45 per hour
PDS 2010 Labcoater 2 Parylene Deposition System
$35 per hour
PLS 6.120D Universal Laser System
$13 per hour
Roland MDX-50 Benchtop CNC Milling Machine
$25 per hour
Shellback SRD
$17 per hour
SPTS XeF2 Etcher
$85 per hour
Technic Electroplating Tool (Cu)
$50 per hour
Tescan EBL
$45 per hour
Tystar LPCVD
$45 per hour
UpNano 3D Printer
$65 per hour
4Dimensions four-point probe
$12 per hour
Wet Bench
$12 per hour*
Woollam Ellipsometer
$15 per hour
Additional charges for supplies, such as crucibles and wafers, will be added to the PI’s monthly invoice.
There is no additional hourly rate for the use of the wet benches for on-site users. A fee will be assessed for staff runs.
Fees for Staff Operation/Training of Equipment
TAMU Users
- Instrument usage: rates listed above
- Training: instrument rate + $45/hr for staff time
- Hourly fee for staff runs: instrument rate + $65/hr
- Hourly fee for staff assistance/supervision of complex operations: instrument rate + $30/hr
Outside Academic Users
- Instrument rates: 150% of rates listed above
- Training: instrument rate + $67.50/hr for staff time
- Hourly fee for staff runs: instrument rate + $97.50/hr
- Hourly fee for staff assistance/supervision of complex operations: instrument rate + $45/hr
*Non-TAMU users pay instrument rate + staff time for analysis
Industry Users
- Instrument rates: 300% of rates listed above
- Training: instrument rate + $135/hr (staff time)
- Hourly fee for staff runs: instrument rate + $195/hr
- Hourly fee for staff assistance/supervision of complex operations: instrument rate + $90/hr
*Non-TAMU users pay instrument rate + staff time for analysis
