Seminars
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- September 1, 2026
Dr. Sung Oh Woo – [email protected]
Topic: Electron Beam Lithography: introduction, operational principle, and application to nanofabrication. - September 15, 2026
Dr. Javad Mohebinia – [email protected]
Topic: Introduction to New Capabilities: Electroplating and Chemical Mechanical Polishing - October 6, 2026
Start time will be 12:15pm for this date and the location will be GERB Conference Room 315
Dr. Yu Chen – [email protected]
Topic: Heidelberg MLA150 + Edge Bead Removal (EBR) and Back Side Rinse (BSR) Procedure and Results on CEE Spin Coater - October 20, 2026
Dr. Rajasree Krishnan – [email protected]
Topic: Wafer Thinning and Dicing in Semiconductor Fabrication - November 3, 2026
Yaguang Lian – [email protected]
Topic: Introduction to Isotropic XeF₂ Etching for MEMS Devices - November 17, 2026
Dr. Prithvi Basu – [email protected]
Topic: Atomic Layer Deposition (ALD) and Plasma-Enhanced Chemical Vapor Deposition (PECVD) Overview Procedures (SOPs) and cleanliness protocols in a cleanroom facility are mandatory.
- September 1, 2026
