
The 4 Dimensions 280SI Automap Four-Point Probe Station is a contact mode system to measure the electrical properties such as resistivity, sheet resistance, wafer mapping, etc. of bulk and thin films.
Measuring Capabilities: Metal, epi, alloy, diffusion, ion implantation and polysilicon bulk and thin films
Platen Size: 2” to 8”.
Measurement Range: 1E-3 to 8E5 Ohm/sq
Coming Soon: 4 Dimensions 280SI Automap Four-Point Probe Station Standard Operating Procedure
Please use iLab to reserve time on this equipment.