The Bruker DektakXT Surface Profiler is a stylus-based surface profiler that is able to perform 3D scanning of surfaces for surface structure mapping.
Thin/thick film step height measurement
Technique: Contact measurement
Stylus sensor type: Thermally stable LVDT sensor
Stylus force: 1 – 15 mg
Stylus radius: 12.5 µm
Scan length range: 55 mm
Data points per scan: up to 120,000
Maximum wafer size: 200 mm (8 in.)
Vertical range: 1 mm
Vertical resolution: 1 Å
Please use the iLab system to schedule time to use this equipment.