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You are here: Home / Equipment / Bruker DektakXT Surface Profiler

Bruker DektakXT Surface Profiler

Dektak

The Bruker DektakXT Surface Profiler is a stylus-based surface profiler that is able to perform 3D scanning of surfaces to map their topography.

Thin/thick film step height measurement

Technique: Contact measurement

Stylus sensor type: Thermally stable LVDT sensor

Stylus force: 1 – 15 mg

Stylus radius: 12.5 µm

Scan length range: 55 mm

Data points per scan: up to 120,000

Maximum wafer size: 200 mm (8 in.)

Vertical range: 1 mm

Vertical resolution: 1 Å

Dektak XT Profilometer Standard Operating Procedure

Please use the iLab system to schedule time to use this equipment.

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