The Oxford Plasmalab80Plus (PECVD) is a plasma processing system to carry out high quality plasma enhanced chemical vapor deposition (PECVD) of SiOx, SiNx, and SiOxNy for a wide range of applications including photonics structures, passivation, hard mask, etc.
Deposition layers: SiOx, SiNx
Wafer size: up to 8”
Temperature: up to 400°C
Power: 300W 13.56MHz RF generator
Available gases: SiH4, NH3, N2O, N2, O2, CF4
Total gas flow: 150 – 3000 sccm
Pressure: 200 – 2000 mTorr
Please use the iLab system to schedule time to use this equipment.