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Fume Hoods

Fume Hoods

There are a total of 6 fume hoods in Bay 1 and 4 fume hoods in Bay 4. 

Each fume hood is marked with the types of chemicals that can be used in it (e.g., oxidizers, corrosives, or photoresist baking and developing) and the chemicals that are stored underneath it.

Note that AggieFab provides the following chemical etchants that can be used in the fume hoods dedicated for corrosives: Al etchant, Cr etchant, Cu etchant, and buffered oxide etchant.

AggieFab also provides the following chemicals for general use: acetone, HCl, HF, H2SO4, hydrogen peroxide 30%, IPA, and methanol.

Standard Operating Procedure for Prep of Piranha Solution

 

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Lithography/Patterning

Nanoscribe Photonics GT2 high-resolution 3D Printer Direct Laser Write Lithography

Suss MA-6 Mask Aligner

EVG 610 Double-sided Mask Aligner

BIDTEC SP100 Spin Coater

FEI Helios NanoLab 460F1 DualBeam Focused Ion Beam (FIB)

TESCAN MIRA3 E-beam Writer

Zeiss Orion Plus 5015 Helium Ion Microscope/NanoFab

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Veeco NT 9100 Profiler

Bruker DektakXT Profiler

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Leica Reichert Polylite 88 Optical Microscope

Caltex 3D Microscope

Nikon Eclipse LV150N Optical Microscope

Bonding/Dicing

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Micro Automation Dicing Saw

EVG 501 Wafer Bonder

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Cressington Gold Sputter Coater

MTI RTP Anneal Furnace

Tystar LPCVD

ASM P8200/P3000 ALD

Lesker PVD 75 E-Beam Evaporator 1

Lesker PVD 75 E-Beam Evaporator 2

Oxford Plasmalab 80 PECVD

Lesker PVD 75 DC Sputter

Lesker PVD 75 RF Sputter

Minibrutes Oxidation/Anneal Furnace

PDS 2010 Labcoter2 Parylene Deposition System

CLUSTEX 100sp Sputter

Plasma Etching

Tegal Asher

Nordson March CS 1701 RIE tool

Oxford Plasmalab 100 ICP RIE

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PLS6.120D Laser Engraver

Roland MDX-50 Benchtop CNC

EnvisionTech 3D Printers

Other Equipment

Laurell Spin Coater

Baxter Drying Ovens

Hot Plate Vacuum Chamber

Fume Hoods

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AggieFab Nanofabrication Facility (AggieFab)

Frederick E. Giesecke Engineering Research Building
1617 Research Parkway
College Station, TX 77843

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Texas A&M University Department of Electrical and Computer Engineering
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