The Ocean Optics NanoCalc DUV Spectroscopic Thin Film Measurement tool utilizes spectroscopic reflectometry to accurately determine the thickness and optical parameters of thin films.
Thickness range: 1 nm – 100 µm
Layers: up to 10 layers stack
Optical resolution: 0.1 nm
Repeatability: 0.3 nm
Wavelength range: 190 – 1100 nm
Angle of incidence: 90
Ocean Optics NanoCalc Standard Operating Procedure
Please use the iLab system to schedule time to use this equipment.
