Overview
The Bruker FilmTek 2000 Reflectometer is an optical measurement system capable of characterizing thin films on silicon wafers. It integrates fiber optic spectrophotometry with advanced optical modeling to characterize thin-film properties.
Capabilities
· Measures the film thickness, refractive index (n), and extinction coefficient (k).
· Characterization of films deposited on Si wafers in the 240-950 nm wavelength range.
· Capable of modeling multilayer thin-film stacks.
· Automated wafer mapping for evaluating thickness uniformity across the wafer surface is possible.
· Supports wafer sizes ranging from 2”-8” in diameter.
