Lithography/Patterning
Location
Bay 4 4H
Bay 4 4G
Bay 4 4C
Bay 4 4B
Bay 4 4K
Characterization
Location
Bay 1 1F
Bay 1 1G
Bay 1 1E
Bay 1 1N
Bay 3 3F
Bonding/Dicing
Location
Bay 1 1J
Bay 1 1K
Bay 1 1M
Deposition/Diffusion
Location
Bay 2 2H
Bay 2 2C
Bay 2 2F
Bay 2 2E
Bay 2 2G
Bay 2 2D
Bay 2 2I
Bay 2 2L
Bay 2 2M
Bay 2 2N
Bay 2 2B
Bay 2 2J
Bay 3 3G
Plasma Etching
Location
Bay 3 3A
Bay 3 3H
Bay 3 3C
Bay 3 3J
Bay 3 3I
Rapid Prototyping
Location
Other Equipment
Location
Bay 4
Bay 4
Bays 1 & 4
