The Semiprobe PS4L Probe Station is a manual prober used for electrical characterization of wafer-level or chip-level devices. A Keithley 4200A SCS Parameter Analyzer is integrated with this probe station. This analyzer is highly accurate and versatile as it comes equipped with a Source Measure Unit (SMU), an ultrafast Pulse Measure Unit (PMU), and a Remote Preamplifier/Switch Module (RPM).
Probe Station Features:
Wafer Sizes:Â Up to 8″
Heating and Cooling: -60°C to 300°C
Isolation:Â Dark Box and Vibration Isolation Table
Parameter Analyzer Features:
OS:Â Windows 10
4211-SMU:
 – High power: Up to 21W, 1A range, and ±210V
 – High low current stability
 – Resolution down to 10aA w/ RPM
4225-PMU:
 – Measure range: ±40V and ±800mA
 – Minimum Pulse Width: 20ns
 – Simultaneous I & V Measurements
4225-RPM:
 – Enhanced resolution for PMU and SMU
 – Allows automatic switching between PMU and SMU
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