The FEI HELIOS NANOLAB 460F1 Dual-Focused Ion Beam (FIB) is a DualBeam focused-ion beam (FIB) instrument capable of adding/removing materials at the nanometer scale and see structure/composition. In AggieFab, it is tasked with nanomachining complex 3D structures using deposition and etching (EBID), ion milling and material manipulation. It is also used to prepare ultrathin samples for atomic scale analysis in transmission electron microscopes (TEM).
Simultaneous imaging of SE and BSE signals
Resolution: 0.7nm @ 1kV, opt WD (SEM)
Resolution: 4.0nm @ 30 kV, coincident WD (FIB)
Integrated EasyLift nanomanipulator for in-situ manipulation
High throughput TEM prep recipes
Flipstage 3 for faster STEM imaging