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You are here: Home / Equipment / FEI Helios NanoLab 460F1 DualBeam Focused Ion Beam (FIB)

FEI Helios NanoLab 460F1 DualBeam Focused Ion Beam (FIB)

FEI Helios NanoLab 460F1 DualBeam Focused Ion Beam (FIB)

The FEI HELIOS NANOLAB 460F1 Dual-Focused Ion Beam (FIB) is a DualBeam focused-ion beam (FIB) instrument capable of adding/removing materials at the nanometer scale and indicating the structure/composition. In AggieFab, it is tasked with nanomachining complex 3D structures using electron beam-induced deposition (EBID), ion milling and material manipulation. It is also used to prepare ultrathin samples for atomic scale analysis during transmission electron microscopy (TEM). 

Simultaneous imaging of secondary electron (SE) and backscattered electron (BSE) signals

Resolution: 0.7nm @ 1kV, opt WD (SEM)

Resolution: 4.0nm @ 30 kV, coincident WD (FIB)

Integrated EasyLift nanomanipulator for in-situ manipulation

High throughput TEM prep recipes

SDD Energy Dispersive Spectroscopy (EDS) capable

Flipstage 3 for faster STEM imaging

Please use iLab to reserve this tool.

Helios SEM Standard Operating Procedure

Helios FIB Standard Operating Procedure

Helios EDS Standard Operating Procedure

EDS Capability Flyer

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Lithography/Patterning

Nanoscribe Photonics GT2 high-resolution 3D Printer Direct Laser Write Lithography

UpNano NanoOne 1000 US 2PP 3D printer

Heidelberg MLA150 Maskless Lithography System

EVG 610 Double-sided Mask Aligner

BIDTEC SP100 Spin Coater

FEI Helios NanoLab 460F1 DualBeam Focused Ion Beam (FIB)

TESCAN MIRA3 E-beam Writer

Characterization

Woollam Alpha-SE Spectroscopic Ellipsometer

Bruker DektakXT Profiler

Evident LEXT Scanning Microscope​

Ocean Optics Film Measurement

Micromanipulator 6100 Probe Station

4 Dimensions 4 Point Probe

Leica Reichert Polylite 88 Optical Microscope

Caltex 3D Microscope

Nikon Eclipse LV150N Optical Microscope

Bonding/Dicing

MPP Wire Bonder

Disco Hi-Tec Dicing Saw

EVG 501 Wafer Bonder

Deposition/Diffusion

Cressington Gold Sputter Coater

MTI RTP Anneal Furnace

Allwin21 AccuThermo AW610M RTP

Tystar LPCVD

Lesker PVD 75 E-Beam Evaporator 1

Lesker PVD 75 E-Beam Evaporator 2

Oxford Plasmalab 80 PECVD

Lesker PVD 75 DC Sputter

Lesker PVD 75 RF Sputter

Minibrutes Oxidation/Anneal Furnace

PDS 2010 Labcoter2 Parylene Deposition System

CLUSTEX 100sp Sputter

Plasma Etching

Tegal Asher

Nordson March CS 1701 RIE tool

Oxford Plasmalab 100 ICP RIE

Oxford Estrelas DRIE

Rapid Prototyping

PLS6.120D Laser Engraver

Roland MDX-50 Benchtop CNC

EnvisionTech 3D Printers

Other Equipment

Laurell Spin Coater

Baxter Drying Ovens

Hot Plate Vacuum Chamber

Fume Hoods

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AggieFab Nanofabrication Facility (AggieFab)

Frederick E. Giesecke Engineering Research Building
1617 Research Parkway
College Station, TX 77843

Texas A&M Engineering Experiment Station
Texas A&M University Department of Electrical and Computer Engineering
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