The BIDTEC SP100 Spin Coater is used for coating photoresist on samples with various sizes. The user can specify the rotations per minute (RPM) that are needed to uniformly spread the photoresist they are applying.
Spin rate: up to 5000 RPM
Sample size: approximately 1″ wafer pieces to 4″ wafers
Standard Operating Procedure for BIDTEC SP100 Spin Coater
Please use the iLab system to schedule time to use this equipment.