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You are here: Home / Equipment / MICRO AUTOMATION 1100 Dicing Saw

MICRO AUTOMATION 1100 Dicing Saw

DicingSaw GERB
Dicing Saw 2

The MICRO AUTOMATION 1100 Dicing Saw is a microprocessor-controlled, programmable, and automatic dicing saw for cutting semiconductor wafers and glass substrates. AggieFab provides two separate dicing saws, one with optics installed for alignment and another with a monitor installed for alignment. 

Dicing Saw 1: Monitor based alignment (A5 on AggieFab schematic)

Dicing Saw 1 Standard Operating Procedure

Dicing Saw 2: Optics based alignment (A9 on AggieFab schematic)

Dicing Saw 2 Standard Operating Procedure

Cutting methods: Dicing and Scribing

Wafer dimensions: 2 – 6”

Wafer thickness: 1 – 500 mils

Spindle speed: 15,000 – 40,000 rpm

Operating temperature: 25°C

Please use the iLab system to schedule time to use this equipment.

***Note that a special tape and UV curing system are available to ease removal of diced die from tape***

Flyer for UV curing machine

Standard Operating Procedure for UV curing machine

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AggieFab Nanofabrication Facility (AggieFab)

Frederick E. Giesecke Engineering Research Building
1617 Research Parkway
College Station, TX 77843

Texas A&M Engineering Experiment Station
Texas A&M University Department of Electrical and Computer Engineering
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