The Zeiss Orion Plus 5015 Helium Ion Microscope/NanoFab is the world’s first helium ion microscope, and it is used to either fabricate delicate sub-10nm structures or generate high-resolution images of the device.
Scanning Ion Microscope
Gas Field Ion Source (GFIS) technology
Resolution: 0.5nm @ 30kV
Beam energy: 10 – 30 kV
Beam current: 0.1 – 100 pA
Detector: Everhart Thornley SE
Stage: motorized 5 axis eucentric stage
