The Veeco FPP 5000 Four Point Probe is a simple to use tool that measures wafer resistivity. The tool can accommodate up to 6″ wafers.
Capable of measuring: sheet/slice resistivity, voltage/current, metal thickness, and material typing
Veeco FPP 5000 Four Point Probe Standard Operating Procedure
The minimum recommended sample size is 1 cm x 1 cm. If your sample is smaller than this, a correction factor needs to be applied. See this document for details.
Additional helpful information can be found here.
Please use iLab to reserve time on this equipment.
