The CANON FPA 2000-i1 is an advanced i-line wafer stepper that allows printing high-density VLSI devices and produces devices with the highest yields possible.
Installation Ongoing
Specifications
- Printing wavelength: i-line (365 nm)
- Wafer size: up to 4”
- Reticle size: 5”
- Numerical aperture: 0.52
- Image field: 20 mm
- Resolution: 0.5 µm
- Illumination lamp: 1.5kW super high pressure Hg lamp
- Wafer leveling: Die-by-die leveling and global leveling
