The Samco UV-1 UV-Ozone Cleaner applies ultraviolet radiation, ozone, and/or heat to the surface of a sample. The UV-1 can be used for substrate cleaning, photoresist descumming, improving wettability, surface modification, and UV curing all while operating at atmospheric pressure.
Sample size: up to 6″
Sample material: Si, GaAs, Sapphire, metals, ceramics, quartz, and glass
Sample temperature: Up to 300°C, PID Controller
Samco UV-Ozone Cleaner Standard Operating Procedure
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