The Evident LEXT™ OLS5100-LAF 3D Confocal Laser Scanning Microscope will provide rapid nondestructive measurements of surface shapes and roughness. The Evident LEXT also provides automated routine workflows to improve efficiency of long scans.
Technique: Noncontact measurement laser
Measuring Abilities: Surface roughness, step height, optical properties
Max. Measuring Points per Scan: 4096 × 4096 pixels
Max. Sample Height: 37mm
Lateral Resolution: 0.12μm
Height Display Resolution: 0.5nm
Height Accuracy: 0.15 + L/100μm (L: Measuring length [μm])
Width Display Resolution: 1nm
Width Accuracy: ±1.5%
Stage: 300mm × 300mm, motorized
Evident LEXT Scanning Microscope Standard Operating Procedure
Please use the iLab system to schedule time to use this equipment.
