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You are here: Home / Equipment / Evident LEXT Scanning Microscope​

Evident LEXT Scanning Microscope​

EvidentLEXT

The Evident LEXT™ OLS5100-LAF 3D Confocal Laser Scanning Microscope will provide rapid nondestructive measurements of surface shapes and roughness. The Evident LEXT also provides automated routine workflows to improve efficiency of long scans.

Technique: Noncontact measurement laser

Measuring Abilities: Surface roughness, step height, optical properties

Max. Measuring Points per Scan: 4096 × 4096 pixels

Max. Sample Height: 37mm

Lateral Resolution: 0.12μm 

Height Display Resolution: 0.5nm

Height Accuracy: 0.15 + L/100μm (L: Measuring length [μm])

Width Display Resolution: 1nm

Width Accuracy: ±1.5%

Stage: 300mm × 300mm, motorized

 

Evident LEXT Scanning Microscope Standard Operating Procedure

 

Please use the iLab system to schedule time to use this equipment.

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Frederick E. Giesecke Engineering Research Building
1617 Research Parkway
College Station, TX 77843

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Texas A&M University Department of Electrical and Computer Engineering
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