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You are here: Home / Equipment / Coming Soon: CEE X-Pro II Auto-Developer Workstation

Coming Soon: CEE X-Pro II Auto-Developer Workstation

CEEautodev

The CEE X-Pro II Auto-Developer Workstation is equipped with the CEE Apogee 200 Spin Developer, which is a semi-automated, stand-alone system designed for precise and reproducible lithography development processes. These processes can be configured to dispense various developers, followed by an H2O rinse and N2 drying, providing complete dry-in/dry-out capability. The workstation features a HDPE spin bowl, ensuring broad chemical resistance and durability. Additionally, it includes an automatic drain separator and N2 purge system for efficient solvent handling and contamination control.

Substrate Sizes: 1/8″(4 mm) to 200 mm wafers and up to 6” X 6” photomasks ​

Available Developers: AZ400k1:4, MIF300, MIF319, SU-8 developer, DI water, IPA

 

Coming Soon: CEE Auto-Developer Standard Operating Procedure

Coming Soon: CEE Auto-Developer Flyer

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Texas A&M University Department of Electrical and Computer Engineering
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