Lithography/Patterning
Nanoscribe Photonics GT2 high-resolution 3D Printer Direct Laser Write Lithography
Suss MA-6 Mask Aligner
EVG 610 Double-sided Mask Aligner
BIDTEC SP100 Spin Coater
FEI Helios NanoLab 460F1 DualBeam Focused Ion Beam (FIB)
TESCAN MIRA3 E-beam Writer
Zeiss Orion Plus 5015 Helium Ion Microscope/NanoFab
Characterization
Veeco NT 9100 Profiler
Bruker DektakXT Profiler
Ocean Optics Film Measurement
Micromanipulator 6100 Probe Station
Veeco 4 Point Probe
Leica Reichert Polylite 88 Optical Microscope
Caltex 3D Microscope
Nikon Eclipse LV150N Optical Microscope
Bonding/Dicing
K&S Wire Bonder
Micro Automation Dicing Saw
EVG 501 Wafer Bonder
Deposition/Diffusion
Cressington Gold Sputter Coater
MTI RTP Anneal Furnace
Tystar LPCVD
ASM P8200/P3000 ALD
Lesker PVD 75 E-Beam Evaporator 1
Lesker PVD 75 E-Beam Evaporator 2
Oxford Plasmalab 80 PECVD
Lesker PVD 75 DC Sputter
Lesker PVD 75 RF Sputter
Minibrutes Oxidation/Anneal Furnace
PDS 2010 Labcoter2 Parylene Deposition System
CLUSTEX 100sp Sputter
Plasma Etching
Tegal Asher
Nordson March CS 1701 RIE tool
Oxford Plasmalab 100 ICP RIE
Rapid Prototyping
PLS6.120D Laser Engraver
Roland MDX-50 Benchtop CNC
EnvisionTech 3D Printers
Other Equipment
Laurell Spin Coater
Baxter Drying Ovens
Hot Plate Vacuum Chamber
Fume Hoods