AggieFab Nanofabrication Facility https://validator.w3.org/feed/docs/rss2.html Home SPTS Xactix e2 XeF2 Etching System Clustex 100sp PVD tool Evatec CLN200E AlScN Sputtering System Elionix ELS-BODEN 150 Electron Beam Lithography System People Equipment Technic Semcon 1000 Cu Electroplater Shellback Spin Rinse Dryer 820 Evident LEXT Confocal Laser Scanning Microscope​ Equipment Menu Training Lesker PVD Electron Beam Evaporation Nanoscribe Photonics GT2 high-resolution 3D printer UpNano NanoOne 1000 US 2PP 3D printer Bruker DektakPro Surface Profiler Fees Bruker Dimension Icon AFM CN1 Atomic Premium Thermal ALD CN1 Atomic Premium PEALD Plasma-Therm Corial 210IL F-Based ICP RIE Coming Soon: Plasma-Therm Corial 210IL Cl-Based ICP RIE Coming Soon: CEE X-Pro II Auto-Developer Workstation Coming Soon: Technic Semcon 1000 Ni Electroplater Coming Soon: Technic Semcon 1000 Au Electroplater Coming Soon: G&P POLI-400L Chemical Mechanical Polisher DRAFT (1st): Samco PD-220NL PECVD Lesker PVD 200 DC Sputtering Tool Diener Plasma Cleaner Laurell Spin Coater CEE X-Pro II Spin Coating Workstation EVG 610 Double-sided Mask Aligner LESKER PVD 200 RF + DC Sputtering Tool Disco Hi-Tec Dicing Saw Samco UV-1 UV-Ozone Cleaner TESCAN MIRA 3 for Electron Beam Lithography MPP Dual Wire Bonder 4 Dimensions 280SI Automap Four-Point Probe Station Semiprobe Probe Station & Keithley Paramter Analyzer MTI Annealing Furnaces Heidelberg MLA150 Maskless Lithography System Allwin21 AccuThermo AW610M RTP Coming Soon: G&N RC Plus Backside Grinder MINIBRUTE Oxidation/Anneal Furnace Ocean Optics NanoCalc DUV Spectroscopic Thin Film Measurement Oxford Estrelas DRIE Tystar LPCVD tool Nordson March CS-1701 RIE tool Fume Hoods FEI Helios NanoLab 460F1 DualBeam Focused Ion Beam (FIB)